Fell, AndreasAndreasFellHopman, SybilleSybilleHopmanKray, DanielDanielKrayWilleke, GerhardGerhardWilleke2022-03-102022-03-102007https://publica.fraunhofer.de/handle/publica/356281en621Transient 3D-simulation of laser-induced ablation of siliconconference paper