Synthesis of thick, uniform, smooth ultrananocrystalline diamond films by microwave plasma-assisted chemical vapor deposition

Huang, W.S.W.S.HuangTran, D.T.D.T.TranAsmussen, J.J.AsmussenGrotjohn, T.A.T.A.GrotjohnReinhard, D.D.Reinhard2022-03-102022-03-102006https://publica.fraunhofer.de/handle/publica/35258710.1016/j.diamond.2005.09.0272-s2.0-33644894189en621671553Synthesis of thick, uniform, smooth ultrananocrystalline diamond films by microwave plasma-assisted chemical vapor depositionconference paper