Optical evaluation of the large signal behaviour of piezoelectric disc actuators to increase the precision of micro diaphragm pumps

Bußmann, AgnesAgnesBußmannKorzer, PhilippPhilippKorzerWald, ChristianChristianWald2022-03-142022-03-142021https://publica.fraunhofer.de/handle/publica/4100792-s2.0-85117713120en621Optical evaluation of the large signal behaviour of piezoelectric disc actuators to increase the precision of micro diaphragm pumpsconference paper