Simple and efficient method to fabricate nano-cone arrays by FIB milling demonstrated on planar substrates and on protruded structures

Under CopyrightRommel, MathiasMathiasRommelBauer, A.J.A.J.BauerFrey, L.L.Frey2022-03-114.9.20122011https://publica.fraunhofer.de/handle/publica/37476210.24406/publica-fhg-374762enfocused ion beam (FIB)FIB patterningpatterning strategynano cone arraytip array670620530Simple and efficient method to fabricate nano-cone arrays by FIB milling demonstrated on planar substrates and on protruded structuresposter