Realization of a computed tomography setup to achieve resolutions below 1 mu m

Salamon, M.M.SalamonHanke, R.R.HankeKrüger, P.P.KrügerUhlmann, N.N.UhlmannVoland, V.V.Voland2022-03-042022-03-042008https://publica.fraunhofer.de/handle/publica/21610810.1016/j.nima.2008.03.024en621539Realization of a computed tomography setup to achieve resolutions below 1 mu mjournal article