Jambaldinni, S.S.JambaldinniBartsch, JonasJonasBartschMondon, AndrewAndrewMondonKluska, SvenSvenKluskaPadilla, M.M.PadillaBüchler, AndreasAndreasBüchlerGlatthaar, MarkusMarkusGlatthaarGlunz, Stefan W.Stefan W.Glunz2022-03-122022-03-122014https://publica.fraunhofer.de/handle/publica/387202enSolarzelleEntwicklungCharakterisierungSilicium-PhotovoltaikKontaktierungStrukturierung621697Investigation of Salicide Process from Sputtered Nickel on Structured SiNx ARC for Mono-Crystalline Si Solar Cellsconference paper