Impact of alternative mask stacks on the imaging performance at NA 1.20 and above

Philipsen, V.V.PhilipsenMesuda, K.K.MesudaBisschop, P. deP. deBisschopErdmann, A.A.ErdmannCitarella, G.G.CitarellaEvanschitzky, P.P.EvanschitzkyBirkner, R.R.BirknerRichter, R.R.RichterScherübl, T.T.Scherübl2022-03-102022-03-102007https://publica.fraunhofer.de/handle/publica/35686210.1117/12.7466782-s2.0-42149119189en670620530Impact of alternative mask stacks on the imaging performance at NA 1.20 and aboveconference paper