Under Copyright2022-03-0812.5.20212021https://publica.fraunhofer.de/handle/publica/30098010.24406/publica-fhg-300980de620667670Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik. Jahresbericht 2020/2021Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology. Annual Report 2020/2021annual report