VLSI Micro- and Nanophotonics. Science, Technology, and Applications

Lee, E.-H.2022-03-022022-03-022011978-1-4200-1790-8978-1-57444-729-3978-1-282-90319-7https://publica.fraunhofer.de/handle/publica/164280VLSI Micro- and Nanophotonics. Science, Technology, and Applications