Compact driver module for closed-loop control of resonant 2D-MOEMS scanners

Tortschanoff, A.A.TortschanoffKenda, A.A.KendaSandner, T.T.SandnerKremer, M.M.KremerFrank, A.A.Frank2022-03-142022-03-142014https://publica.fraunhofer.de/handle/publica/4070522-s2.0-85064603517en621Compact driver module for closed-loop control of resonant 2D-MOEMS scannersconference paper