Pfeffer, M.M.PfefferPfitzner, L.L.PfitznerBauer, A.A.Bauer2022-03-132022-03-132016https://publica.fraunhofer.de/handle/publica/395538This paper will present advances in equipment research, in metrology equipment research, in improved collaboration strategies between equipment suppliers and end-users and in better controlled and smart manufacturing.enSemiconductor equipment assessment - An enabler for production ready equipmentconference paper