Under CopyrightSicker, CorneliusCorneliusSickerHeber, JörgJörgHeberBerndt, DirkDirkBerndt2022-03-142022-03-142018https://publica.fraunhofer.de/handle/publica/403452https://doi.org/10.24406/h-40345210.24406/h-403452en621Subnanometer calibration of diffractive micromirror arraysconference paper