Kammer, S.S.KammerWien, S.S.WienKoch, K.P.K.P.KochRobitzki, A.A.RobitzkiStieglitz, T.T.Stieglitz2022-03-032022-03-032002https://publica.fraunhofer.de/handle/publica/203124Biomedical microsystems attain to contact with environments like blood, ephitHelium and saline solutions therefore they need an encapsulation. Parylene seems to be a suitable polymer to cover the implants and protect them against moisture and aggressive environment. This paper describes the characterisation of Parylene C coatings and its possibilities to protect implants. Beside the encapsulation of biomedical microsystems the manufacturing of fexible electrodes and the cytotoxicity behavior of RIE etched Parylene layers was investigated.de610journal article