Grazing incidence diffraction by epitaxial multilayered gratings

Baumbach, T.T.BaumbachLübbert, D.D.LübbertPietsch, U.U.PietschDarowski, N.N.DarowskiLeprince, L.L.LeprinceTalneau, A.A.TalneauSchneck, J.J.Schneck2022-03-032022-03-031998https://publica.fraunhofer.de/handle/publica/19379910.1016/S0921-4526(98)00262-2en620658670531Grazing incidence diffraction by epitaxial multilayered gratingsjournal article