Barz, J.J.BarzHaupt, MichaelMichaelHauptVohrer, UweUweVohrerHilgers, H.H.HilgersOehr, C.C.Oehr2022-03-102022-03-102005https://publica.fraunhofer.de/handle/publica/34868410.1016/j.surfcoat.2005.02.064en610620660Ultrathin carbon-fluorine film processingconference paper