Clarke, R.R.ClarkeShang, XiaobangXiaobangShangRidler, Nick M.Nick M.RidlerLozar, RogerRogerLozarProbst, ThorstenThorstenProbstArz, UweUweArz2022-03-142022-03-142020https://publica.fraunhofer.de/handle/publica/40859610.1109/ARFTG47584.2020.9071783The development, modelling and characterization of millimeter-wave semiconductor devices calls for accurate and reproducible on-wafer measurements. We report on an interlaboratory study involving on-wafer S-parameter measurements in the 140 GHz to 220 GHz band, conducted by three well-established measurement laboratories. The measurements can be used to form typical reproducibility limits for these measurements when conducted in different laboratories using different equipment and calibration methods.enon-wafer measurementco-planar waveguidemeasurement repeatabilitymeasurement reproducibilitymeasurement uncertainty667conference paper