Under CopyrightRumler, MaximilianMaximilianRumlerFörthner, MichaelMichaelFörthnerKollmuss, ManuelManuelKollmussBaier, LeanderLeanderBaierStumpf, FlorianFlorianStumpfBecker, MarcoMarcoBeckerRommel, MathiasMathiasRommelFrey, LotharLotharFrey2022-03-134.11.20172017https://publica.fraunhofer.de/handle/publica/39827410.24406/publica-fhg-398274enhierarchical structuredirect laser writingnanoimprint lithography670620530One-step fabrication of hierarchical structuresposter