Axmann, A.A.AxmannContreras, G.G.ContrerasCompaan, A.A.CompaanCardona, M.M.CardonaWagner, J.J.Wagner2022-03-082022-03-081984https://publica.fraunhofer.de/handle/publica/313406enhochdotiertes GermaniumIonenimplantationLaserausheilung621667Germanium extremely heavily doped by Ion-implantation and laser annealing - A photoluminescence studyconference paper