Preparation and characterization of carbonate terminated polycrystalline Al2O3/Al films

Tornow, C.C.TornowNoeske, P.-L.M.P.-L.M.NoeskeDieckhoff, S.S.DieckhoffWilken, R.R.WilkenGärtner, K.K.Gärtner2022-03-032022-03-032005https://publica.fraunhofer.de/handle/publica/20921610.1016/j.apsusc.2005.03.1762-s2.0-27944481755en620660671669Preparation and characterization of carbonate terminated polycrystalline Al2O3/Al filmsjournal article