Laser-induced fluorescence and emission spectroscopic study of magnetic field effects in a low-pressure etch plasma

Hoffmann, P.P.HoffmannHeinrich, F.F.Heinrich2022-03-032022-03-031991https://publica.fraunhofer.de/handle/publica/18016610.1063/1.351397en621530Laser-induced fluorescence and emission spectroscopic study of magnetic field effects in a low-pressure etch plasmajournal article