Under CopyrightAugel, LionLionAugelWen, HanyingHanyingWenKnobbe, JensJensKnobbe2024-02-072024-02-072023-08-02https://publica.fraunhofer.de/handle/publica/459624https://doi.org/10.24406/publica-255510.24406/publica-2555Short-wavelength infrared detection has shown an enormous potential for future application in autonomous systems and security. Up to today the use has been limited by the cost for high quality detectors. Using TiN Schottky barrier photodetectors with pyramidal photonic nanostructures opens a path to circumvent the typically low quantum efficiencies with compatibility to CMOS technology.enPhotodetectorSchottky barrierCMOS technologyNanophotonicsDDC::600 Technik, Medizin, angewandte Wissenschaften::600 Technikconference paper not in proceedings