Zhao, YixiongYixiongZhaoBuchholz, JanJanBuchholzLigges, ManuelManuelLiggesBögel, Gerd vomGerd vomBögelBalzer, Jan C.Jan C.BalzerSeidl, KarstenKarstenSeidl2022-03-152022-03-152021https://publica.fraunhofer.de/handle/publica/41273610.1109/IRMMW-THz50926.2021.95671122-s2.0-85125302515In this work, we demonstrate a photonic crystal (PC) resonator with a large hole in the center for biosensing in the terahertz (THz) regime. The design has the potential to be integrated with a microfluidic channel for automated pathogen detection. The strongly concentrated electric field around the hole and high Q factor lead to high sensitivity and high figure of merit (FOM) for a thin layer (in the µm range) of analyte. The resonator is fabricated by laser cutting of high resistance silicon (HRSi) and its sensing performance is experimentally characterized.enBiosensorTerahertz (THz)photonic crystals621conference paper