Wislicenus, MarcusMarcusWislicenusLiske, RomyRomyLiskeGerlich, LukasLukasGerlichVasilev, BorisBorisVasilevPreusse, AxelAxelPreusse2022-03-122022-03-122014https://publica.fraunhofer.de/handle/publica/385501en621Cobalt advanced barrier metallization: A resist composition analysisconference paper