Moyne, J.J.MoyneSchellenberger, M.M.SchellenbergerPfitzner, L.L.Pfitzner2022-03-122022-03-122014https://publica.fraunhofer.de/handle/publica/38761210.1109/ESSDERC.2014.6948781The International Technology Roadmap for Semiconductors (ITRS) is probably the single most important document governing the direction of the semiconductor manufacturing industry. The Factory Integration (FI) chapter seeks to define a roadmap for semiconductor factories and enterprise systems. This roadmap has gone through a significant revision over the past 2 years with a focus on commonality, integration, and data driven. New sub-chapters have been created for prediction, big data, and control systems architectures. Challenges and potential solutions have been identified for each of these sub-chapters, some of which are common across industries, and others of which are unique to the semiconductor manufacturing industry.en670conference paper