Under CopyrightErlbacher, TobiasTobiasErlbacherRattmann, GudrunGudrunRattmann2022-03-1428.5.20192019https://publica.fraunhofer.de/handle/publica/40460510.24406/publica-fhg-404605en670620530TSV-based passive networks for monolithic integration in smartpower ICS for automotive applicationspresentation