One-step fabrication of hierarchical structures by direct laser writing through PDMS molds

Under CopyrightRumler, MaximilianMaximilianRumlerFörthner, MichaelMichaelFörthnerBaier, LeanderLeanderBaierMarhenke, JuliusJuliusMarhenkeKollmuss, ManuelManuelKollmussMichel, FelixFelixMichelBecker, MarcoMarcoBeckerRommel, MathiasMathiasRommel2022-03-1316.5.20172017https://publica.fraunhofer.de/handle/publica/39654910.24406/publica-fhg-396549ennanoimprintdirect laser writingPDMShierarchical structures670620530One-step fabrication of hierarchical structures by direct laser writing through PDMS moldspresentation