Pfeffer, M.M.PfefferPfitzner, L.L.PfitznerBauer, A.A.Bauer2022-03-132022-03-132015https://publica.fraunhofer.de/handle/publica/39132110.1109/ASMC.2015.7164498A detailed presentation of history, recent and current projects in the area of Semiconductor Equipment Assessment in Europe were presented. The topics and objectives of the ongoing equipment assessments within the SEA4KET framework were described. The importance on a horizontal and vertical collaboration in a global perspective was elaborated.enSemiconductor equipment assessment - an enabler for production ready equipmentconference paper