Wackerle, M.M.WackerleRichter, M.M.RichterWoias, P.P.WoiasGoldschmidtböing, F.F.Goldschmidtböing2022-03-092022-03-092000https://publica.fraunhofer.de/handle/publica/335865en621Sub-nl flow measurement method for microfluidic actuatorsconference paper