Life time of flexible PDMS stamps for UV-enhanced substrate conformal imprint lithography (SCIL)

Under CopyrightFader, RobertRobertFaderRumler, M.M.RumlerRommel, MathiasMathiasRommelBauer, A.J.A.J.BauerFrey, L.L.FreyBrehm, M.M.BrehmKraft, A.A.KraftReboud, V.V.ReboudLandis, S.S.Landis2022-03-126.11.20132013https://publica.fraunhofer.de/handle/publica/38111510.24406/publica-fhg-381115en670620530Life time of flexible PDMS stamps for UV-enhanced substrate conformal imprint lithography (SCIL)presentation