2022-03-022022-03-022019978-1-5386-8104-6978-1-5386-8105-3978-1-7281-2007-2https://publica.fraunhofer.de/handle/publica/16454920th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII, TRANSDUCERS & EUROSENSORS 2019