Ramm, P.P.RammWeber, J.J.Weber2022-03-052022-03-052017https://publica.fraunhofer.de/handle/publica/254641Without microelectronics, the ""Internet of Things"" (IoT) would be blind, deaf, and mute. But in order to be able to keep up with rapid development in this digital age, chips must become smaller, more multifunctional, and more powerful. 3D integration is considered a key technology in order to keep moving the boundaries of the possible further out.en621journal article