Progress in high-rate electron beam evaporation of oxides for web coating

Schiller, S.S.SchillerNeumann, M.M.NeumannMorgner, H.H.MorgnerSchiller, N.N.Schiller2022-03-092022-03-091993https://publica.fraunhofer.de/handle/publica/321940en667670620Progress in high-rate electron beam evaporation of oxides for web coatingconference paper