Tortschanoff, A.A.TortschanoffBaumgart, M.M.BaumgartHolzmann, D.D.HolzmannLenzhofer, M.M.LenzhoferSandner, T.T.SandnerKenda, A.A.Kenda2022-03-122022-03-122013https://publica.fraunhofer.de/handle/publica/38128210.1117/12.2016852Recently, we have realized a new position sensing device for MOEMS mirrors applicable to arbitrary trajectories, which is based on the measurement of a reflected light beam with a quadrant diode. In this work we present the characteristics of this device, showing first experimental results obtained with a test set-up, but also theoretical considerations and optical ray-tracing simulations.enconference paper