Nanotechnology 2010. Technical proceedings of the NSTI Nanotechnology Conference and Expo - Nanotech Conference & Expo. Vol.2: Electronics, devices, fabrication, MEMS, fluidics and computational

Laudon, M.2022-03-022022-03-022010978-1-4398-3402-21-4398-3402-4978-1-439-83418-3https://publica.fraunhofer.de/handle/publica/150258Nanotechnology 2010. Technical proceedings of the NSTI Nanotechnology Conference and Expo - Nanotech Conference & Expo. Vol.2: Electronics, devices, fabrication, MEMS, fluidics and computational