Melzig, ThomasThomasMelzigBruns, StefanStefanBrunsVergöhl, MichaelMichaelVergöhlTerhürne, JörgJörgTerhürne2023-05-022023-05-022022https://publica.fraunhofer.de/handle/publica/44123610.1364/OIC.2022.WC.82-s2.0-85139170366The accuracy of broadband monitoring during coatings can be improved by transmittance measurement of the uncoated or backcoated monitor substrate before process start. Numerical comparison with the theory eliminates e.g. water absorption or spectrometer transitions.enconference paper