Under CopyrightViegas, Alison ErleneAlison ErleneViegasKühnel, KatiKatiKühnelYang, ShouzhuoShouzhuoYangFalidas, Konstantinos EfstathiosKonstantinos EfstathiosFalidasCzernohorsky, MalteMalteCzernohorsky2025-07-222025-07-222024-08-06https://publica.fraunhofer.de/handle/publica/489765https://doi.org/10.24406/publica-491610.24406/publica-4916enFerroelectricCMOSMFMMetal-ferroelectric-metalIncipient ferroelectric properties in as-deposited hafnium zirconium oxide for BEoL applicationsposter