Characterisation of oxide-CMP slurries with fumed-silica abrasive particles modified by wet-jet miling

Zwicker, G.G.ZwickerJacobsen, H.H.JacobsenLortz, W.W.LortzStachowiak, E.E.StachowiakBrandes, R.R.Brandes2022-03-102022-03-102004https://publica.fraunhofer.de/handle/publica/346590en621Characterisation of oxide-CMP slurries with fumed-silica abrasive particles modified by wet-jet milingconference paper