International Conference on Precision Measurement, ICPM 2008. Pt.1: Nanomeasuring and Nanopositioning Technology

Jäger, G.G.JägerWagner, E.E.Wagner2022-03-042022-03-042009https://publica.fraunhofer.de/handle/publica/21917110.1524/teme.2009.9010en621681International Conference on Precision Measurement, ICPM 2008. Pt.1: Nanomeasuring and Nanopositioning Technologyeditorial