Streppel, U.U.StreppelBräuer, A.A.BräuerDannberg, P.P.DannbergWächter, C.C.WächterNicole, PPNicole2022-03-092022-03-092001https://publica.fraunhofer.de/handle/publica/338192A novel technology for stacking layers of waveguides is presented. This technique enables the manufacturing of vertically integrated waveguide devices with accurate cross-sections and index distributions. The resulting potential for further applications is discussed.enstacked waveguideUV absorbervertical integrationwaveguide array620conference paper