Combination of direct laser writing and soft lithography molds for combined nano- and microfabrication

Under CopyrightRumler, MaximilianMaximilianRumlerKollmuss, ManuelManuelKollmussBaier, LeanderLeanderBaierMichel, FelixFelixMichelFörthner, MichaelMichaelFörthnerBecker, MarcoMarcoBeckerRommel, MathiasMathiasRommelFrey, LotharLotharFrey2022-03-139.11.20162016https://publica.fraunhofer.de/handle/publica/39355110.24406/publica-fhg-393551endirect laser writingnanoimprinthierarchical structuresPDMS670620530Combination of direct laser writing and soft lithography molds for combined nano- and microfabricationposter