Highly reflective optical coatings for high power applications of micro scanning mirrors in the UV-VIS-NIR spectral region

Sandner, T.T.SandnerSchmidt, J.U.J.U.SchmidtSchenk, H.H.SchenkLakner, H.H.LaknerYang, M.M.YangGatto, A.A.GattoKaiser, N.N.KaiserBraun, S.S.BraunFoltyn, T.T.FoltynLeson, A.A.Leson2022-03-102022-03-102006https://publica.fraunhofer.de/handle/publica/35129410.1117/12.644626enMOEMSmicro scanning mirrorNIR-VIS-UVhighly reflective coatinghigh optical power density621671Highly reflective optical coatings for high power applications of micro scanning mirrors in the UV-VIS-NIR spectral regionconference paper