Tschernajew, M.M.TschernajewHädrich, S.S.HädrichKlas, R.R.KlasGebhardt, M.M.GebhardtHorsten, R.R.HorstenWeerdenburg, S.S.WeerdenburgPyatchenkov, S.S.PyatchenkovCoene, W.W.CoeneRothhardt, J.J.RothhardtEidam, T.T.EidamLimpert, J.J.Limpert2022-03-152022-03-152020https://publica.fraunhofer.de/handle/publica/41215310.1364/ASSL.2020.JTh2A.21A 100W fiber laser system is used to drive a high repetition rate HHG beamline producing record-high photon flux of >1011 photons/s at 69-75eV and >1010 photons/s for harmonics between 115eV and 140eV.en620conference paper