Under CopyrightVelasco-Velez, J.J.J.J.Velasco-VelezDoll, T.T.DollChaiyboun, A.A.ChaiybounWilbertz, C.C.WilbertzWöllenstein, J.J.WöllensteinBauersfeld, M.-L.M.-L.Bauersfeld2022-03-1012.8.20102008https://publica.fraunhofer.de/handle/publica/36000410.1109/ICSENS.2008.4716394Complete modelling of electrically controlled nanoscale gas sensors with Poisson, Wolkenstein, Fokker-Planck and continuity is presented. Based on a plausible Drift explanation we developed suitable models for sensitivity control and operational modes. An onset for CMOS-complying annealing procedures is given.enCMOS integrated circuitsannealinggas sensor621conference paper