Machul, O.O.MachulHammerschmidt, D.D.HammerschmidtBrockherde, W.W.BrockherdeHosticka, B.J.B.J.HostickaObermeier, E.E.ObermeierKrause, P.P.Krause2022-03-092022-03-091997https://publica.fraunhofer.de/handle/publica/329063A smart pressure transducer with a piezo resistive sensor microbridge, digitally controlled readout electronics, and a nonlinear temperature compensation based on spline functions, is integrated on a single CMOS chip. The chip also contains a temperature sensor and control hardware for test and calibration functions. The calibration process of the sensing and temperature compensation parameters has been optimized for high volume production.enDruckmessungInterpolationKalibrierenMeßaufnehmerSensorausleseTemperaturkompensation621conference paper