Ernst, C.C.ErnstWerner, D.D.Werner2022-03-092022-03-091999https://publica.fraunhofer.de/handle/publica/333399IC-Manufacturing requires high quality fluids with lowest levels of particles and trace impurities. Suppliers of fluidhandling components and systems are obliged to prove the evidence of the products' suitability. The definition and usage of classification models is not practicable. Standardized specifications as a reference and in some cases even the test guidelines are missing.enHigh Purity MediaReinheitsspezifikationReinheitsklasseVersorgungslogistikMedia Supply SystemSpurenverunreinigungSEMISEMATECHChemikalieRichtliniestandardgasTeilchen670conference paper