Hosticka, B.J.B.J.HostickaBrockherde, W.W.BrockherdeHammerschmidt, D.D.Hammerschmidt2022-03-032022-03-031997https://publica.fraunhofer.de/handle/publica/19126610.1023/A:1008298120754Silicon sensor systems are based on capability of silicon to serve as a basic material for monolithic cointegration of sensors and electronics. Implementation of this cointegration, its advantages and benefits, and examples of silicon sensor systems form the cental part of this contribution.enintegrierte HalbleiterschaltungMeßaufnehmermicrosystemsMikrosystemtechniksiliciumsilicon sensorssmart sensors621journal article