Richter, A.A.Richter2022-03-082022-03-081991https://publica.fraunhofer.de/handle/publica/302526A microminiaturized pump consists of two stacked, interconnected pump bodies consisting of a semiconductor material, the pump bodies comprising electrically conducting areas which are electrically insulated from each other. In order to extend the application of such pumps for the pumping of aqueous solutions, at least one of the two pump bodies has a thin elastic area resembling a diaphragm in which is integrated at least one non-return valve having an inlet opening and a covering end plate, whereby the thin elastic area resembling a diaphragm surrounds a part of the electrically conducting area of a pump body, whereby the electrically conducting area of the other pump body is arranged at a short distance to the first pump body in relation to the surface dimensions of the thin elastic area resembling a diaphragm.de608621patent1990-4006152