Koerner, K.K.KoernerFritz, H.H.FritzNyarsik, L.L.NyarsikSpur, G.G.SpurUhlmann, E.E.Uhlmann2022-03-082022-03-081998https://publica.fraunhofer.de/handle/publica/304112The description relates to a device for the topographical inspection of the surfaces of an object to be tested. The invention is characterized by the fact that it comprises the following components: - at least one light source, - at least one light-distributing surface, - at least one projection stage and - one detector for electromagnetic radiation.de608670Vorrichtung und Verfahren zur Pruefung der Gestalt einer Oberflaeche eines zu vermessenden ObjektesProcess and device for the topographical inspection of surfacespatent1993-43130571993-43130611993-4334388