Sciarratta, V.V.SciarrattaHegemann, D.D.HegemannMüller, MichaelMichaelMüllerVohrer, UweUweVohrerOehr, C.C.Oehr2022-03-102022-03-102005https://publica.fraunhofer.de/handle/publica/35000510.1002/3527605584.ch3en610620660Upscaling of plasma processes for carboxyl functionalizationconference paper