Molter, DanielDanielMolterEllenberger, Kim-SophieKim-SophieEllenbergerKlier, JensJensKlierDuran, StefanStefanDuranJonuscheit, JoachimJoachimJonuscheitFreymann, Georg vonGeorg vonFreymannVieweg, NicoNicoViewegDeninger, AnselmAnselmDeninger2023-01-192023-01-192022https://publica.fraunhofer.de/handle/publica/43410910.1109/IRMMW-THz50927.2022.9896014We present our recent results on multilayer terahertz imaging at 1.6 kHz pixel rate employing an ECOPS (electronically controlled optical sampling) based terahertz time-domain spectroscopy system. Using a rotating sample and a translating measurement head, we image individual layer thicknesses on metallic and nonmetallic disks of 300 mm diameter in less than 3 minutes.enmultilayersterahertz spectroscopyterahertz wave imagingterahertz wave spectrathickness measurementDDC::500 Naturwissenschaften und Mathematikconference paper